Measurement Technology for Micro-Nanometer Devices
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale• Highlights the advanced research work from industry and academia in micro-nano devices test technology• Written at both introductory and advanced levels, provides the fundamentals and theories• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
- प्रतिलिपि अधिकार:
- 2016 National Defense Industry Press
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