Measurement Technology for Micro-Nanometer Devices

By: Wendong Zhang • Xiujian Chou • Tielin Shi • Zongmin Ma • Haifei Bao • Jingdong Chen • Liguo Chen • Dachao Li • Chenyang Xue

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Synopsis

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale• Highlights the advanced research work from industry and academia in micro-nano devices test technology• Written at both introductory and advanced levels, provides the fundamentals and theories• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Book Details

Book Quality:
ISBN-13:: 9781118717998
Publisher:: Wiley
Date of Addition:: 2020-05-27T18:38:13Z
Language:: English
Categories:: Nonfiction, Technology,
Usage Restrictions:: This is a copyrighted book.